cessing, and data acquisition features." The term MEMS refer to the devices that are on a millimetre scale with micro-resolution. It is the integration of mechanical elements, sensors, actuators and electronics on common silicon substrate through the utilization of microfabrication technology .
There are several broad categories of MEMS fabrication technologies. They are Bulk micromachining, Surface micromachining, LIGA, Deep reactive ion etching and the integrated MEMS technologies. The brief  of each of the technologies is given below
Bulk micromachining is a fabrication technique which builds mechanical elements by starting with a silicon wafer, and then etching away unwanted parts, and being left with useful mechanical devices .'The advantages are less cost high reliability, manufacturability, and good repeatability . Surface Micromachining builds devices up from the wafer layer-by-layer . ...Show more